Micro Gas Mass Flow Meter
[Features of gas mass flow meter]
Min flow range
The gas mass flow meter with micro flow range 0~5sccm.
Multiple Output
The hydrogen gas flow meter output is 0~5V;4·20mA;RS485/232
Flow meter and flow controller
The flow meter also with control function to control flow range.
High Accuracy and High Pressure
The standard accuracy is 1.0% and high pressure is 3.0Mpa
[Parameters]
| The parameters of gas mass flow meter | |
| Medium | Gas |
| Flow Range | 0~5sccm;0~500sccm;0~100slm;100~200L/min |
| Power supply | 12-24V |
| Output | 0~5V;4~20mA |
| Display | Local LCD Display or none |
| Communication | RS485/232 |
| Accuracy | 1.0% |
| Difference pressure | less than 0.3Mpa |
| Max pressure | 3.0Mpa |
| Temperature | 5~65c |
| Connection |
6mm ferrule connector |
